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MEMS Vibratory Gyroscopes Cenk Acar

MEMS Vibratory Gyroscopes By Cenk Acar

MEMS Vibratory Gyroscopes by Cenk Acar


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Summary

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations.

MEMS Vibratory Gyroscopes Summary

MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness by Cenk Acar

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

MEMS Vibratory Gyroscopes Reviews

From the reviews:

This book reviews the principles of linear and torsional dynamics of vibratory gyroscopes. ... The book provides a comprehensive review of the state-of-the-art of MCGs that would undoubtedly be useful for specialist engineers. (Benu Chatterjee, Materials World, March, 2011)

Table of Contents

Fundamentals of Micromachined Vibratory Gyroscopes.- Fundamentals of Micromachined Gyroscopes.- Fabrication Technologies.- Mechanical Design of MEMS Gyroscopes.- Electrical Design of MEMS Gyroscopes.- Structural Approaches to Improve Robustness.- Linear Multi DOF Architecture.- Torsional Multi DOF Architecture.- Distributed Mass Architecture.- Conclusions and Future Trends.

Additional information

NLS9781441934895
9781441934895
1441934898
MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness by Cenk Acar
New
Paperback
Springer-Verlag New York Inc.
2010-11-09
260
N/A
Book picture is for illustrative purposes only, actual binding, cover or edition may vary.
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Customer Reviews - MEMS Vibratory Gyroscopes