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Industrial Plasma Engineering J Reece Roth (University of Tennessee, Knoxville, USA)

Industrial Plasma Engineering By J Reece Roth (University of Tennessee, Knoxville, USA)

Industrial Plasma Engineering by J Reece Roth (University of Tennessee, Knoxville, USA)


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Summary

Offers a background in the principles and applications of low temperature, partially ionized Lorentzian plasmas that are used industrially. This book also presents a description of plasma-related processes and devices that are of commercial interest. It is suitable for students with a physics and calculus background at the sophomore level.

Industrial Plasma Engineering Summary

Industrial Plasma Engineering: Volume 2 - Applications to Nonthermal Plasma Processing by J Reece Roth (University of Tennessee, Knoxville, USA)

Written by a leading expert in the field, the paperback edition of Industrial Plasma Engineering, Volume 2: Applications to Nonthermal Plasma Processing provides a background in the principles and applications of low temperature, partially ionized Lorentzian plasmas that are used industrially. The book also presents a description of plasma-related processes and devices that are of commercial interest. The text is suitable for students or in-service users with a physics and calculus background at the sophomore level. These two volumes are intended to be used as textbooks at the senior or first-year graduate level by students from all engineering and physical science disciplines and as a reference source by in-service engineers.

About J Reece Roth (University of Tennessee, Knoxville, USA)

J Reece Roth

Table of Contents

Surface Interactions in Plasma Processing. Atmospheric Pressure Plasma Sources. Vacuum Plasma Sources. Plasma Reactors for Plasma Processing. Specialized Techniques and Devices for Plasma Processing. Parametric Plasma Effects on Plasma Processing. Diagnostics for Plasma Processing. Plasma Treatment of Surfaces. Surface Modification by Implantation and Diffusion. Thin Film Deposition by Evaporative Condensation and Sputtering. Plasma Chemical Vapor Deposition (PCVD). Plasma Etching.

Additional information

NLS9780750305457
9780750305457
0750305452
Industrial Plasma Engineering: Volume 2 - Applications to Nonthermal Plasma Processing by J Reece Roth (University of Tennessee, Knoxville, USA)
New
Paperback
Taylor & Francis Ltd
2001-08-25
658
N/A
Book picture is for illustrative purposes only, actual binding, cover or edition may vary.
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