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Process Engineering Analysis in Semiconductor Device Fabrication Stanley Middleman

Process Engineering Analysis in Semiconductor Device Fabrication By Stanley Middleman

Process Engineering Analysis in Semiconductor Device Fabrication by Stanley Middleman


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Summary

The material included in this text covers a range of processess in semiconductor device fabrication. The authors try to present traditional chemical engineering methodology in a non-traditional context. The text covers topics such as crystal growth and filtration.

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Process Engineering Analysis in Semiconductor Device Fabrication Summary

Process Engineering Analysis in Semiconductor Device Fabrication by Stanley Middleman

Written primarily for chemical engineering students, the material included in this new text is an extension of upper level chemical engineering courses. Covering a range of processes in semiconductor device fabrication, the authors try to present traditional chemical engineering methodology in a non-traditional context. The text covers such topics as crystal growth and filtration and contains over 300 worked examples and problems.

Table of Contents

The physics of solids; device background; process modelling; the conservation equations; filtration of particles; particle deposition and removal; purity in process chemicals; silicon production; oxidation; microlithography; doping; etching; chemical vapour deposition; ion implantation; metalization.

Additional information

CIN0070418535G
9780070418530
0070418535
Process Engineering Analysis in Semiconductor Device Fabrication by Stanley Middleman
Used - Good
Hardback
McGraw-Hill Education - Europe
1993-01-01
774
N/A
Book picture is for illustrative purposes only, actual binding, cover or edition may vary.
This is a used book - there is no escaping the fact it has been read by someone else and it will show signs of wear and previous use. Overall we expect it to be in good condition, but if you are not entirely satisfied please get in touch with us

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