MEMS Mechanical Sensors by Steve P. Beeby
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MEMS Mechanical Sensors
Summary
The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.
MEMS Mechanical Sensors Summary
Additional information
NPB9781580535366
9781580535366
1580535364
MEMS Mechanical Sensors by Steve P. Beeby
New
Hardback
Artech House Publishers
2004-04-30
284
N/A
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